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197power: 1400 w number of wafers: 4, temperature adjustment |
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196power: 750 W, the number of wafers: 1 |
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198power: 700 W, the number of wafers: 2, temperature control, ready light |
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DI-8101power: 700 W, the number of wafers: 5, the temperature, the ready light |
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ZN 2power: 700 W, the number of wafers: 2, ready light |
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ZN 2.1power: 700 W, the number of wafers: 2 |
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ZN 3power: 700 W, the number of wafers: 10 |
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